| 摘要 |
A substrate supporting apparatus and a substrate inspection apparatus including the same are provided to reduce a manufacturing cost and to improve an inspection speed by fixing and supporting stably a substrate irrespective of a size of the substrate. A substrate supporting apparatus includes a frame(100) having a shape of rectangular frame, a pair of longitudinal supporting bars(200), a pair of lateral supporting bars(300), a pair of longitudinal fixing bars(400), and a pair of lateral fixing bars(500). The frame is composed of a pair of longitudinal beams(120) and a pair of lateral beams(130). The longitudinal supporting bar pair corresponds to the lateral supporting bar pair. Both ends of the longitudinal supporting bar pair are installed along the lateral beam pair. The longitudinal supporting bars are separated from each other or attached closely to each other. The lateral supporting bar pair corresponds to the lateral beam pair. Both ends of the lateral supporting bar pair are installed along the longitudinal beam pair. The lateral supporting bars are separated from each other or attached closely to each other. The longitudinal fixing bar pair are protruded from the longitudinal supporting bar pair. The longitudinal fixing bar pair is used for fixing a longitudinal side of a substrate. The lateral fixing bar pair is protruded from the lateral supporting bar pair. The lateral fixing bar pair is used for fixing a lateral side of the substrate.
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