Novel tantalum complexes and process for preparing method thereof

摘要

PURPOSE: A tantalic compound and a method for preparing the same are provided to ensure excellent thermal stability and volatility. CONSTITUTION: A tantalic compound is denoted by chemical formula 1(R1N=Ta[O-A-NR2R3]x[R4]3-x), 2(R1N=Ta[O-CR5R6(CH2)m-NR2R3]x[R11]3-x), or 3(R1N=Ta[O-CR5R6(CH2)m-NR2R3]x[R12]3-x). The tantalic compound is Ta(NtBu)(OCMe2CH2NMe2)2Cl or Ta(NtBu)(OCMe2CH2NMe2)2Me. A method for preparing the tantanlic compounds comprises a step of reacting tantalic compounds of chemical formula 4(R1N=TaR113Py2) with metal amino alkoxide of chemical formula 5(MO-A-NR2R3).