| 摘要 |
The present invention relates to a head cleaning unit cleaning a head discharging a solution in an inkjet method and an apparatus for treating a substrate including the same. The head cleaning unit cleaning a head including nozzles discharging a solution in an inkjet method according to an embodiment of the present invention comprises a body having a first area and a second area, including an opening formed upward in the longitudinal direction on the first area, and including a collecting space collecting chemicals inside, when the chemicals supplied to the head is discharged through the nozzles; and a suction nozzle absorbing the chemicals remaining in the head, and formed in the second area, wherein the head is moved from the first area to the second area in the first direction. |
