| 摘要 |
A vertical cavity surface emitting laser (100) includes: a substrate (10); a laminated body which is provided over the substrate; an electrode (82) of which at least a portion is provided over the laminated body; and a wire-bonded pad (84) which is electrically connected to the electrode, wherein the laminated body includes a first mirror layer (20) provided over the substrate, an active layer (30) provided over the first mirror layer, and a second mirror layer (40) provided over the active layer, in a plan view, the laminated body (2) includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, and in the plan view, the pad (84) is provided in a position that is not overlapped with at least one of the first distortion imparting portion and the second distortion imparting portion. The non-circular shape of the mesa (2) and lateral oxidation of the mirror layers with high Al content (60,62) being part of the mesa (2) together with the non-circular shape of the resin layer results in a stress induced preferred polarisation of the VCSEL emission. |
