发明名称 |
LASER AMPLIFIER AND LASER DEVICE, AS WELL AS EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM |
摘要 |
[Problem] To suppress propagation of light of a wavelength to be suppressed that is different from a desired wavelength. [Solution] The present invention may be provided with: a chamber which houses a laser medium; a first window which is provided on the chamber, and which causes laser light of a desired wavelength from the outside to be incident to the interior of the chamber; an excitation apparatus which amplifies the laser light incident to the interior of the chamber by exciting the laser medium; a second window which is provided on the chamber, and which outputs the laser light that has been amplified by the excitation apparatus to the outside of the chamber; a mirror which is disposed on a laser optical path between the first window and the second window; and a wavelength-selective film which is disposed on the first window and/or the second window and/or the mirror, and which suppresses propagation of light of a wavelength to be suppressed that is different from a desired wavelength. |
申请公布号 |
WO2015033426(A1) |
申请公布日期 |
2015.03.12 |
申请号 |
WO2013JP73987 |
申请日期 |
2013.09.05 |
申请人 |
GIGAPHOTON INC. |
发明人 |
SUGANUMA, TAKASHI;HOSHINO, HIDEO |
分类号 |
H01S3/23;H01L21/027;H01S3/10 |
主分类号 |
H01S3/23 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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