发明名称 LASER AMPLIFIER AND LASER DEVICE, AS WELL AS EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
摘要 [Problem] To suppress propagation of light of a wavelength to be suppressed that is different from a desired wavelength. [Solution] The present invention may be provided with: a chamber which houses a laser medium; a first window which is provided on the chamber, and which causes laser light of a desired wavelength from the outside to be incident to the interior of the chamber; an excitation apparatus which amplifies the laser light incident to the interior of the chamber by exciting the laser medium; a second window which is provided on the chamber, and which outputs the laser light that has been amplified by the excitation apparatus to the outside of the chamber; a mirror which is disposed on a laser optical path between the first window and the second window; and a wavelength-selective film which is disposed on the first window and/or the second window and/or the mirror, and which suppresses propagation of light of a wavelength to be suppressed that is different from a desired wavelength.
申请公布号 WO2015033426(A1) 申请公布日期 2015.03.12
申请号 WO2013JP73987 申请日期 2013.09.05
申请人 GIGAPHOTON INC. 发明人 SUGANUMA, TAKASHI;HOSHINO, HIDEO
分类号 H01S3/23;H01L21/027;H01S3/10 主分类号 H01S3/23
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