Active metamaterial device and manufacturing method of the same

摘要

Provided are an active metamaterial device operating at a high speed and a manufacturing method thereof. The active metamaterial device includes a first dielectric layer, a lower electrode disposed on the first dielectric layer, a second dielectric layer disposed on the lower electrode, metamaterial patterns disposed on the second dielectric layer, a couple layer disposed on the metamaterial patterns and the second dielectric layer, a third dielectric layer disposed on the couple layer, and an upper electrode disposed on the third dielectric layer.

主权项

1. An active metamaterial device comprising:
a first dielectric layer; a lower electrode over the first dielectric layer; a second dielectric layer over the lower electrode; metamaterial patterns over the second dielectric layer; a couple layer on the metamaterial patterns and the second dielectric layer, wherein the couple layer comprises graphene; a third dielectric layer over the couple layer; an upper electrode over the third dielectric layer; and a bias electrode provided at edges of the couple layer between the couple layer and the third dielectric layer, wherein the bias electrode comprises second and third terminals extending outward from opposing side walls.