发明名称 APPARATUS AND METHOD OF FABRICATING ORGANIC ELECTROLUMINESCENCE DEVICE
摘要 <p>A method and apparatus for fabricating an organic electroluminescent device, are discussed. According to an embodiment, the method includes depositing an organic material on a substrate coupled to a first tray in a first substrate treatment unit using the first tray as a mask, depositing a metal material on the substrate coupled to a second tray in a second substrate treatment unit using the second tray as mask, wherein the deposition of the organic material or the metal material in the first and second substrate treatment units includes primarily moving the first and second trays such that the first and second trays are aligned with the substrate, when each of the first and second trays is coupled to the substrate, and secondarily moving the first and second trays and the substrate such that the substrate and the trays are aligned at predetermined positions.</p>
申请公布号 KR101461037(B1) 申请公布日期 2014.11.13
申请号 KR20120021379 申请日期 2012.02.29
申请人 发明人
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
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