| 主权项 |
1. A micro-electromechanical system for sensing flow of a fluid, the system comprising:
a planar first layer comprising a first face, a second face, and a frame surrounding and supporting a plurality of paddles in cantilever fashion to enable independent deflection of the plurality of paddles; a planar second layer comprising a first face, a second face, and a plurality of openings between the first face and the second face, the first face of the planar second layer positioned adjacent to the second face of the planar first layer; a planar third layer comprising:
a first face positioned adjacent to the second face of the second layer and comprising one or more circuits for producing a plurality of signals responsive to deflection of the plurality of paddles,a second face having conductive pads electrically coupled to receive the plurality of signals, anda plurality of openings between the first face and the second face, the plurality of openings of the planar third layer aligned with the plurality of openings of the planar second layer; and a package enclosing the planar first layer, the planar second layer, and the planar third layer, the package comprising a plurality of openings exposing the plurality of paddles to the fluid. |
