发明名称 THIN FILM TRANSISTOR AND DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor and a display device, which achieve high reliability.SOLUTION: A display device according to an embodiment comprises a thin film transistor including: a gate insulation film; a semiconductor layer which is arranged on a part of one principal surface of the gate insulation film and has a first part through a seventh part; a gate electrode opposite to the semiconductor layer across the gate insulation film; a first channel protection film which covers the third part of the semiconductor layer; a second channel protection film which covers a top face of the first channel protection film, and the fourth part and the fifth part of the semiconductor layer; a first conductive layer which is opposite to the fourth part of the semiconductor layer across the second channel protection film and covers the sixth part; a second conductive layer which is opposite to the fifth part of the semiconductor layer across the second channel protection film and covers the seventh part; and a passivation film which covers the first part and the second part of the semiconductor layer, the first conductive layer, the second conductive layer and the second channel protection film and includes hydrogen of 1.0×10atm/cmand over.
申请公布号 JP2014067920(A) 申请公布日期 2014.04.17
申请号 JP20120213081 申请日期 2012.09.26
申请人 TOSHIBA CORP 发明人 NAKANO SHINTARO;MIURA KENTARO;SAITO NOBUMI;SAKANO TATSUNORI;UEDA TOMOMASA;YAMAGUCHI HAJIME
分类号 H01L21/336;H01L21/28;H01L21/283;H01L29/786;H01L51/50 主分类号 H01L21/336
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