| 摘要 |
PURPOSE: A manufacturing method of a vertical cavity surface emitting laser is provided to be able to improve the reliability of a device by preventing the side part oxidation of an upper mirror layer. CONSTITUTION: A lower mirror layer (220), an active layer (230), a current guide layer and an upper mirror layer are formed on a substrate (200). The upper mirror layer and the current guide layer are mesa-etched so that the active layer is exposed. A passivation material film is formed on the active layer surface exposed by mesa-etching, the current guide layer, and the front side of the upper mirror layer. A mask pattern having an open area which exposes a part of the surface of the passivation material film is formed. A passivation layer (340) selectively exposing the side part (355) of the current guide layer is formed by the mask pattern removing the exposed surface of the passivation material film with an etching barrier mask. The exposed side part of the current guide layer is oxidized to form a current aperture in the center of the current guide layer. |
