发明名称 OPTICAL SCANNING DEVICE
摘要 <p>The invention is directed to an optical scanning device with two scanning mirrors and with optical elements for imaging the two scanning mirrors one onto the other by means of an intermediate image. A control unit is provided for supplying drives which are coupled to the scanning mirrors with excitation voltages or excitation currents to initiate deflection angles ranging from zero to the maximum possible deflection angle for the two scanning mirrors. At least one of the scanning mirrors is designed for biaxial scanning, and the control unit is designed to vary the driving of the two scanning mirrors with respect to biaxial or uniaxial deflection of the beam bundle electively in quasistatic or resonant mode of operation. At least one of the two scanning mirrors is preferably designed as MEMS assembly.</p>
申请公布号 EP2591390(A1) 申请公布日期 2013.05.15
申请号 EP20110728786 申请日期 2011.06.30
申请人 CARL ZEISS MICROSCOPY GMBH 发明人 RICHTER, STEFAN;GEISSLER, ENRICO
分类号 G02B26/10;G02B21/00 主分类号 G02B26/10
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