发明名称 |
SURFACE ACOUSTIC WAVE DEVICE |
摘要 |
A surface acoustic wave device includes a piezoelectric substrate including a groove located in a surface thereof, an IDT electrode, and a dielectric film. The IDT electrode includes a first electrode layer located in the groove and a second electrode layer located outside the groove. The dielectric film is arranged on the piezoelectric substrate so as to cover the IDT electrode. The second electrode layer is tapered toward a side opposite to the piezoelectric substrate. |
申请公布号 |
US2013069481(A1) |
申请公布日期 |
2013.03.21 |
申请号 |
US201213674114 |
申请日期 |
2012.11.12 |
申请人 |
MURATA MANUFACTURING CO., LTD.;MURATA MANUFACTURING CO., LTD. |
发明人 |
KIMURA TETSUYA;IDA YASUYUKI;SAJI MARI |
分类号 |
H01L41/107 |
主分类号 |
H01L41/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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