发明名称 Method for compensating for temperature related measurement errors in a confocal chromatic measuring distance sensor
摘要 According to the invention, a method for compensating for temperature related measurement errors in an optical arrangement, comprising at least one lens is designed with a view to an economical and reliable as possible compensation for temperature related measurement errors without significant increased production expense, wherein a multicolored beam is passed through the optical arrangement, which is focused at points at varying distances from the lens as a result of the chromatic aberration of the lens, at least a part of the spectrum of the light beam being at least partly reflected within the optical arrangement and directed to a detector device by means of which a determination of a spectrum is carried out, the temperature of the arrangement is determined from the spectrum recorded by the detection device and a compensation for temperature related measurement errors is carried out based on the temperature determined thus. A corresponding optical arrangement in disclosed.
申请公布号 US8248598(B2) 申请公布日期 2012.08.21
申请号 US20080598342 申请日期 2008.05.21
申请人 HOENICKA REINHOLD;FINK ALEXANDER;MICRO-EPSILON MESSTECHNIK GMBH & CO. KG 发明人 HOENICKA REINHOLD;FINK ALEXANDER
分类号 G01J3/00 主分类号 G01J3/00
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