| 发明名称 |
METHOD OF APPLYING ATOMIC LAYER DEPOSITION COATINGS ONTO POROUS NON-CERAMIC SUBSTRATES |
| 摘要 |
<p>An article of manufacture includes a body having an inlet and an outlet, and at least a portion of at least one porous non-ceramic substrate positioned such that the porous polymeric substrate separates the inlet from the outlet. The porous non-ceramic substrate has a conformal coating on at least a portion of its interior surfaces.</p> |
| 申请公布号 |
EP2480703(A1) |
申请公布日期 |
2012.08.01 |
| 申请号 |
EP20100819262 |
申请日期 |
2010.09.15 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
DODGE, BILL H. |
| 分类号 |
C23C16/455;C23C16/00;C23C16/06;C23C16/30;C23C16/54;H01L21/205 |
主分类号 |
C23C16/455 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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