| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the efficiency of displacement in a piezoelectric actuator that uses a piezoelectric material serving as a tensile stress film in a deposition state. <P>SOLUTION: The piezoelectric actuator includes: an elastic film provided on one surface of a substrate having a space; and a piezoelectric element provided on the space of the elastic film, wherein the elastic film is displaced toward a direction in which the piezoelectric element is bent, by applying voltage to the piezoelectric element so that the piezoelectric element is bent and oscillated. The elastic film has tensile stress in a portion thereof where the piezoelectric element is formed, and has compressive stress in a periphery thereof where the piezoelectric element is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
