APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA,申请号KR20100072017-传众专利搜索

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发明名称	APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA
摘要
申请公布号	KR101124209(B1)	申请公布日期	2012.03.28
申请号	KR20100072017	申请日期	2010.07.26
申请人		发明人
分类号	H05H1/34	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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