发明名称 BONDING WIRE
摘要 <P>PROBLEM TO BE SOLVED: To provide a bonding wire or bump wire with a remarkable improvement in attraction of palladium and copper by eliminating factors hindering adhesion between palladium plating and a copper core material surface, and by stably forming a palladium coating on the copper core material surface. <P>SOLUTION: In the bonding wire in which a core material 1 composed mainly of copper is subjected to palladium plating 2, a maximum diameter of voids existing in the vicinity of a copper core material interface below a palladium coating layer is 60 nm or less, and the number of voids having a maximum diameter of 10 nm or more which exist per 1 &mu;m of the coating length is 0.6 or less on average. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012049461(A) 申请公布日期 2012.03.08
申请号 JP20100192486 申请日期 2010.08.30
申请人 SUMITOMO METAL MINING CO LTD 发明人 TOGASHI AKIRA
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址