发明名称 FLUID EJECTING NOZZLE AND WASHING DEVICE USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a fluid ejecting nozzle capable of efficiently generating minute bubbles in liquid and blowing liquid including the minute bubbles onto a surface of an object to be washed so as to achieve successful washing. <P>SOLUTION: The fluid ejecting nozzle includes: a unit body 160 having a gas introduction port 164a and a gas ejecting face 163 with a gas ejecting port 164b formed thereon; and a liquid introduction part 161 provided in the unit body 160 and having a liquid passage 161a which is formed thereon and through which liquid is made to pass. A gas passage 164 and a cavity 162 to which the liquid passage 161a of the liquid introduction part 161 is connected are formed in the unit body 160. The gas ejecting face 163 of the unit body 160 is formed to have a bowl shape having a bottom face portion 163a where the gas ejecting port 164b is formed. A plurality of nozzle holes 165 opened in a bowl-shaped peripheral face portion 163b of the gas ejecting face 163 and continued from the cavity 162 are formed on the unit body 160. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012035166(A) 申请公布日期 2012.02.23
申请号 JP20100175937 申请日期 2010.08.05
申请人 SHIBAURA MECHATRONICS CORP 发明人
分类号 B05B7/06;B08B3/02;H01L21/304 主分类号 B05B7/06
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