发明名称 METHOD FOR GRADATIONAL DEPOSITION USING VACUUM DEVICE
摘要 The present invention pertains to a vacuum deposition method for the surface of a product using vacuum equipment and, more specifically, to a method for gradational deposition using a vacuum device, which is characterized in that: a blocking member (7) is provided between a material (4) and a metal target (1) in a chamber (8) in a vacuum state, so that atoms (5) burst out from the metal target (1) are deposited on the material (4) in such a manner that the amount of deposited atoms gradually decrease from the edges of the blocking member (7) towards the center thereof by the interruption of the blocking member (7), when the metal target (1) is applied with a voltage.
申请公布号 WO2011152613(A2) 申请公布日期 2011.12.08
申请号 WO2011KR02353 申请日期 2011.04.05
申请人 PLATEC CO., LTD;KIM, SANG YEONG 发明人 KIM, SANG YEONG
分类号 C23C14/34;C23C14/04;C23C14/56 主分类号 C23C14/34
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