PROCEDURE FOR TREATMENT OF CUTTING TOOL IN STATIONARY COMBINED DISCHARGE OF LOW TEMPERATURE PLASMA OF LOW PRESSURE

摘要

FIELD: metallurgy. ^ SUBSTANCE: tool is positioned in chamber which is vacuumised and is supplied with process gas to working pressure (P). At this pressure there is possible gas break down at minimal strength of electro-magnetic field. Further, positive voltage of bias (U) is supplied on the tool forming electrostatic field around the tool sufficient for maintaining stable generation of plasma and there is generated micro-wave energy to a level of super-high frequency - SHF of power (W) 10-90 Wt. Cutting edges of the tool are subjected to plasma during 1.5-17 minutes (tpr), further, the tool is cooled. Also, during treatment process there is performed control over bias current (I) occurring in a measuring circuit at plasma generation chosen from the range 217 mcA and final lag temperature (T) chosen from the range 10230C. At deviation from the allowed value of bias current (I) the mode of treatment is normalised by changing anode current of a magnetron (Ian). At exceeding the allowed value of final lag temperature (T) treatment of the tool is terminated earlier. ^ EFFECT: raised wear resistance of cutting tool. ^ 4 cl, 10 dwg, 3 tbl