发明名称 MEMS MODULE PACKAGE
摘要 A MEMS module package includes a carrier, a lid capped on the carrier, a spacer disposed between the carrier and the lid, and a chip mounted on the spacer and electrically connected with the carrier. The spacer has a channel in communication between a chamber and a receiving hole of the lid, and the chip is received in the chamber of the lid and corresponding to the channel of the spacer. Therefore, an external signal can be transmitted from the receiving hole of the lid into the chamber of the lid through the channel of the spacer so as be received by the chip.
申请公布号 US2011180924(A1) 申请公布日期 2011.07.28
申请号 US20100707940 申请日期 2010.02.18
申请人 LINGSEN PRECISION INDUSTRIES, LTD. 发明人 TIAN JYONG-YUE;YEH JEN-CHUAN
分类号 H01L23/04 主分类号 H01L23/04
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