SUBSTRATE TRANSFERING APPARATUS FOR CHAMBER SYSTEM AND CHAMBER SYSTEM THEREOF

摘要

PURPOSE: A substrate transferring apparatus for a chamber and the chamber system of the same are provided to improve the reliability and the reproducibility of deposition by easily controlling the exposing and transferring time of a substrate with respect to deposition source. CONSTITUTION: A base frame(110) includes a transferring track on a caterpillar track in a chamber. A substrate supporting unit is installed to be movable along the transferring track. A revolving unit(130) transfers the substrate supporting unit along the transferring track. A rotating unit rotates the substrate supporting unit by being connected with the revolting unit. A substrate fixing part sets a substrate and is supported by a supporting plate. A combining angle adjusting part sets the combining angle of the substrate fixing part.