发明名称 ULTRASONIC WASHING APPARATUS, AND ULTRASONIC WASHING METHOD
摘要 <p>An ultrasonic cleaning apparatus having at least a cleaning tank; an ultrasonic wave transmitting tank; a vibrating plate placed at a bottom portion of the ultrasonic wave transmitting tank, the vibrating plate superposing the ultrasonic waves on the transmitting water with a transducer; and a holding jig for holding the object to be cleaned in the cleaning tank, the apparatus in which the object to be cleaned is ultrasonically cleaned by immersing the object to be cleaned held with the holding jig in the cleaning liquid accommodated in the cleaning tank, putting the cleaning tank into the transmitting water accommodated in the ultrasonic wave transmitting tank, and transmitting the ultrasonic waves superposed with the vibrating plate to the cleaning tank through the transmitting water, the apparatus comprising a transmitting tank oscillating mechanism for oscillating the ultrasonic wave transmitting tank in a horizontal plane.</p>
申请公布号 KR20100137431(A) 申请公布日期 2010.12.30
申请号 KR20107019029 申请日期 2009.01.23
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 ABE TATSUO;KABASAWA HITOSHI;ARAI IZUMI
分类号 B08B3/12;H01L21/304 主分类号 B08B3/12
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