DYNAMIC QUANTITY SENSOR, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To prevent breakage of a flexible portion by alleviating an impact upon collision caused by an excessive displacement of a weight portion and to prevent a degradation in reliability of a detection signal by preventing deformation to a metal wire.

SOLUTION: The dynamic quantity sensor includes: a semiconductor substrate having a frame portion, a weight portion disposed inside the frame portion, and a flexible portion for connecting the weight portion with the frame portion; a plurality of sensor elements formed at the flexible portion; a plurality of electric wires which are attached on the top of the weight portion and for electrically connecting the plurality of sensor elements with a plurality of connection terminals; a cap substrate for covering the tops of the flexible portion attached with the plurality of sensor elements, the plurality of wired flexible portions and the weight portion; and a buffering member which is disposed either or both of the weight portion side and the cap substrate side and alleviating an impact caused by an excessive displacement of the weight portion.

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