| 摘要 |
<P>PROBLEM TO BE SOLVED: To control the phase of each of beams made into multi-beam by a simple structure in a technique for making light from a light source into multi-beam using a plurality of micro-mirrors. <P>SOLUTION: The drawing apparatus 1 for drawing a pattern includes: a light splitting section 15 for splitting laser light by a reflection surface 150; spatial optical modulation devices 16, 17 equipped with a plurality of micro-mirrors; and a parallel flat plate 18 for inverting the phase by 1/4. Laser light emitted to the spatial optical modulation device 17 is subjected to conversion of the phase by 1/2 by the parallel flat plate 18 during forward and backward movement. The beam modulated by the spatial optical modulation device 16 and the beam modulated by the spatial optical modulation device 17 and having the phase inverted by the parallel flat plate 18 are composited in the reflection surface 150, and the substrate 9 is irradiated with the composited beam. <P>COPYRIGHT: (C)2010,JPO&INPIT |
