发明名称 |
Probe Sensor with Multi-Dimensional Optical Grating |
摘要 |
A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe.
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申请公布号 |
US2010180355(A1) |
申请公布日期 |
2010.07.15 |
申请号 |
US20100730603 |
申请日期 |
2010.03.24 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
WANG ZHONG L.;HUGHES WILLIAM L.;BUCHINE BRENT A. |
分类号 |
G01Q20/02;G01Q20/04;G01Q60/38 |
主分类号 |
G01Q20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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