| 摘要 |
PURPOSE: Capacitor structures are provided to increase capacitance by forming a via hole in the same shape according to the shape of a conductive layer. CONSTITUTION: A first electrode(100) is composed of a plurality of conductive layers(ML1-ML4). Each layer comprises one or more openings. Each layer is connected in a vertical direction through a first via(V1-V3). A plurality of second electrodes(102) is made up of a plurality of layers. Each layer is connected in a vertical direction through a second via. A dielectric body(104) is formed between the first electrode and the second electrode. The first via is formed into the same shape as the first electrode. The second via is formed into the same shape as the second electrode. |
