摘要 |
<p>The method involves illuminating an inspection region (13) of a surface of a body (2) i.e. optical element, with an illumination beam (4) i.e. laser beam, by an illumination module (3), where the region is provided with micro-gap surfaces. Reflex (15) produced by reflection at the micro-gap surfaces is detected by a detection module. The region is produced by mechanical processing such as sharpening and lapping, of a surface of the body. The beam and the body are aligned to each other such that the reflex hits a screen (5). The beam is aligned perpendicular to a plane in the region. An independent claim is also included for a device for determining crystal orientation of a body.</p> |