发明名称 PHOTOSENSITIVE RESIN COMPOSITION, POLYMER COMPOUND, METHOD FOR PRODUCING PATTERN, AND ELECTRONIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition capable of forming a hardened pattern or a hardened film, which is excellent in sensitivity, resolution and heat resistance; to provide a method for forming a pattern, which provides the pattern excellent in sensitivity, resolution and heat resistance and having a good shape by using the photosensitive resin composition; and to provide an electronic device which is reliable by forming the pattern having the good shape and good characteristics. <P>SOLUTION: The photosensitive resin composition is characterized by including: a polymer compound (a) obtained by reacting a monomer represented by general formula (1) with a monomer represented by general formula (2); and a photosensitive agent (b). <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009242755(A) 申请公布日期 2009.10.22
申请号 JP20080094243 申请日期 2008.03.31
申请人 FUJIFILM CORP 发明人 WATANABE YASUSHI;SATO KENICHIRO
分类号 C08L81/02;C08G75/04;C08K5/00;G03F7/004;G03F7/023;H01L21/027 主分类号 C08L81/02
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