发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, POLYMER COMPOUND, METHOD FOR PRODUCING PATTERN, AND ELECTRONIC DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition capable of forming a hardened pattern or a hardened film, which is excellent in sensitivity, resolution and heat resistance; to provide a method for forming a pattern, which provides the pattern excellent in sensitivity, resolution and heat resistance and having a good shape by using the photosensitive resin composition; and to provide an electronic device which is reliable by forming the pattern having the good shape and good characteristics. <P>SOLUTION: The photosensitive resin composition is characterized by including: a polymer compound (a) obtained by reacting a monomer represented by general formula (1) with a monomer represented by general formula (2); and a photosensitive agent (b). <P>COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2009242755(A) |
申请公布日期 |
2009.10.22 |
申请号 |
JP20080094243 |
申请日期 |
2008.03.31 |
申请人 |
FUJIFILM CORP |
发明人 |
WATANABE YASUSHI;SATO KENICHIRO |
分类号 |
C08L81/02;C08G75/04;C08K5/00;G03F7/004;G03F7/023;H01L21/027 |
主分类号 |
C08L81/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|