发明名称 Transistor structure of memory device and method for fabricating the same
摘要 A memory device includes an active area protruding from a semiconductor substrate. A recess is formed in the active area. A field oxide layer is formed on the semiconductor substrate. A gate electrode extends across the active area while being overlapped with the recess. A gate insulation layer is interposed between the gate electrode and the active area. Source and drain areas are formed in the active area. The transistor structure above defines a recessed transistor structure if it is sectioned along a source-drain line and defines a Fin transistor structure if it is sectioned along a gate line. The transistor structure ensures sufficient data retention time and improves the current drivability while lowering the back bias dependency of a threshold voltage.
申请公布号 US7601583(B2) 申请公布日期 2009.10.13
申请号 US20070962100 申请日期 2007.12.21
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JANG SE AUG;KIM YONG SOO;OH JAE GEUN;ROHH JAE SUNG;SOHN HYUN CHUL
分类号 H01L29/72 主分类号 H01L29/72
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