| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanning microscope which does not change observation magnification so much even if the working distance of an objective is changed. SOLUTION: The optical scanning microscope 1 includes: an objective optical system 11 for changing light from a sample A to nearly parallel beams; an optical image forming system 10 for forming an image at a predetermined position with the nearly parallel beams from the objective optical system 11; a pupil projection optical system 9 for making the light with which the image is formed at the predetermined position by the optical image forming system 10 nearly parallel luminous fluxes; a lateral direction scanning means 8 for scanning an observation position of the sample A in a lateral direction by deflecting the angle of nearly parallel luminous fluxes from the pupil projection optical system 9; and a lens driving means 12 for driving at least either the optical image forming system 10 or the pupil projection optical system 9 in an optical axis direction. The optical image forming system 10 is arranged so that its front-side focus may be positioned near the rear-side focus of the objective optical system 11 when setting the side of the sample A as a front side. COPYRIGHT: (C)2009,JPO&INPIT
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