发明名称 PROGRAMMABLE ELEMENT AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 In one aspect of the present invention, a programmable element, may include a semiconductor substrate, source/drain layers formed apart from each other in the upper surface of the semiconductor substrate, a gate insulating film including a charge-trapping film containing Hf and formed on a portion between the source/drain layers of the semiconductor substrate, and a gate electrode formed on the gate insulating film with a program voltage applied to the gate electrode.
申请公布号 US2009078987(A1) 申请公布日期 2009.03.26
申请号 US20080143019 申请日期 2008.06.20
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKAYANAGI MARIKO
分类号 H01L29/792;H01L21/336 主分类号 H01L29/792
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