| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting table structure which is provided with a temperature measuring means for each of a plurality of heating zones, can maintain high in-plane uniformity of a processing body continuously, and can maintain high thermal treatment repeatability. SOLUTION: The mounting table structure includes: a mounting table 32 including a heating means 40 having heaters 38A, 38B concentrically arranged for each of the plurality of heating zones and for mounting the processing body; temperature measuring means 70A, 70B provided for each of the heating zones; and a strut 30 provided in a hollow condition for erecting and supporting the mounting table. A diameter of the strut is successively enlarged in a direction from its lower end side to an upper end, also the upper end is bonded to the rear of the mounting table, and a main body of the measuring means of the temperature measuring means is inserted into the hollow strut and an insertion path provided in a side wall of the strut. COPYRIGHT: (C)2009,JPO&INPIT
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