| 摘要 |
PROBLEM TO BE SOLVED: To accurately, stably control the floating height of a base board by preventing the front end part or back end part of the base board from thrashing, while it is being floated and conveyed, to improve the quality and film thickness of the coating film. SOLUTION: A base board-conveying part 84 is provided with a pair of guide rails 100L and 100R which are arranged in parallel on both the sides of a floating-type stage 80 which floats a base board G in the air with the force of a gas pressure, a pair of sliders 102L and 102R which are installed so that they may be movable on these rails in the conveying direction (X direction), a conveyance-driving part which straight moves the sliders 102L and 102R simultaneously or in parallel on the guide rails 100L and 100R, and holding parts 106 which are mounted on the sliders 102L and 102R to removably hold the four corners of the base board G. COPYRIGHT: (C)2008,JPO&INPIT
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