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发明名称
CAPACITOR OVER PLUG STRUCTURE
摘要
申请公布号
EP1543560(B1)
申请公布日期
2008.05.21
申请号
EP20030797235
申请日期
2003.08.12
申请人
QIMONDA AG;KABUSHIKI KAISHA TOSHIBA
发明人
BEITEL, GERHARD;HILLIGER, ANDREAS;MOON, BUM-KI;NAGEL, NICOLAS;TSUCHIYA, TAKAMICHI;YABUKI, MOTO
分类号
H01L21/02;H01L27/105;H01L27/115;H01L27/108;H01L21/285;H01L21/8242;H01L21/8246
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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