Method for connecting an optical element with a fitting on at least one connecting site used in semiconductor lithography comprises indirectly or directly positioning the element and the fitting during connection using a support element

摘要

Method for connecting an optical element (1) with a fitting (2) on at least one connecting site comprises indirectly or directly positioning the element and the fitting during connection using a support element (3) which is formed as part of the fitting. Independent claims are also included for the following: (1) Device comprising an optical element positioned in a fitting; and (2) Optical device with a fitting and an optical element arranged in the fitting using connection to at least one connecting site.