发明名称 |
Process for making light waveguide element |
摘要 |
A light waveguide element is made by forming only an upper clad layer ( 40 ) and a core layer ( 32 ) without etching an optical axis height-adjusting sections. By using plasma chemical vapor deposition (CVD) which is good at controlling the film thickness, it is possible to provide without difficulty a light waveguide element with a height-adjusting section that has a precise film thickness, making it possible to provide precise optical axis vertical alignment upon mounting. By forming alignment markers in the same photolithography as that of the core formation, it is possible to provide precise horizontal optical axis alignment.
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申请公布号 |
US7323352(B2) |
申请公布日期 |
2008.01.29 |
申请号 |
US20050196271 |
申请日期 |
2005.08.04 |
申请人 |
OKI ELECTRIC INDUSTRY CO., LTD. |
发明人 |
UNO YUTAKA |
分类号 |
H01L21/20;G02B6/12;G02B6/122;G02B6/13;G02B6/136;G02B6/30;G02B6/42 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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