| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device capable of adjusting an introducing amount of ozone into a chamber according to material quality of a sample and capable of irradiating a stable electron beam. SOLUTION: The electron beam device to irradiate the electron beam generated from an electron gun onto the sample placed on a stage has an ozone gas introducing means to introduce ozone gas into the chamber in which the electron gun and a stage are housed, and a control means of making the ozone gas introducing means to introduce either ozone-containing gas or oxygen into the chamber according to the material quality of the sample, and of making a gas amount of the ozone-containing gas or oxygen in the chamber constant regardless of the material quality of the sample. The ozone gas introducing means may have an oxygen supply means, an ozone gas forming means to form the ozone containing gas in which the ozone gas and oxygen are constituted to have a prescribed ratio, and may have a gas introducing amount adjusting means to adjust the gas amount introduced into the chamber. COPYRIGHT: (C)2008,JPO&INPIT
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