发明名称 COOLING/HEATING APPARATUS AND MOUNTING APPARATUS
摘要 A cooling/heating apparatus for circulating the cooled or heated transfer medium to a load to thereby cool or heat the load includes a heat transfer medium circulation path and a Stirling heat engine. The Stirling heat engine includes a first and a second cylinder chamber; a first and a second piston for expanding or compressing an operation gas in the first and the second cylinder chamber; and a driving mechanism for driving the first and the second piston. When the driving mechanism is driven in a forward direction, the operation gas is expanded in the first cylinder chamber and its temperature decreases, thus cooling the heat transfer medium, whereas, when the driving mechanism is driven in a backward direction, the operation gas is compressed in the first cylinder chamber and its temperature increases, thus heating the heat transfer medium.
申请公布号 US2007204610(A1) 申请公布日期 2007.09.06
申请号 US20070682118 申请日期 2007.03.05
申请人 TOKYO ELECTRON LIMITED 发明人 HATTA MASATAKA
分类号 F02G1/04;F01B29/10 主分类号 F02G1/04
代理机构 代理人
主权项
地址