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发明名称
A SPINNER APPARATUS FOR A SEMICONDUCTOR DEVICE FABRICATION
摘要
申请公布号
KR100706219(B1)
申请公布日期
2007.04.11
申请号
KR19990056646
申请日期
1999.12.10
申请人
发明人
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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