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发明名称
水清除剂及使用其之光阻图型的形成方法
摘要
本发明提供一种减低浸液微影制程中之缺陷的光阻图型之形成方法。其系藉由包含,在曝光后显像之前预先加热,以至少含有非水溶剂之水清除剂,去除经浸液曝光之晶圆表面的黏附水之步骤的浸液微影制程之光阻图型形成方法。为去除浸液微影制程中之曝光用水的含非水溶剂之水清除剂。
申请公布号
TW200707130
申请公布日期
2007.02.16
申请号
TW095111027
申请日期
2006.03.29
申请人
旭硝子股份有限公司
发明人
岛田丰通
分类号
G03F7/38(2006.01);C11D7/28(2006.01);H01L21/027(2006.01)
主分类号
G03F7/38(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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