发明名称 Phase-change memory device and method of manufacturing the same
摘要 Disclosed are a phase-change memory device and its manufacturing method, which can reduce a contact area between a bottom electrode and a phase-change layer, thereby reducing the quantity of current necessary for phase change. The phase-change memory device comprises: a first oxide layer formed on a dielectric interlayer and a bottom electrode on a substrate and having a contact hole for exposing the bottom electrode formed in the first oxide layer; a spacer formed on a side surface of the contact hole; a phase-change layer formed on the spacer and the bottom electrode while forming a shape of another spacer; a second oxide layer filling in the contact hole while exposing an upper portion of the phase-change layer; and a top electrode formed on the first oxide layer while being in contact with the upper portion of the phase-change layer.
申请公布号 US7173271(B2) 申请公布日期 2007.02.06
申请号 US20040000471 申请日期 2004.11.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHANG HEON YONG
分类号 H01L47/00;H01L23/52 主分类号 H01L47/00
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