ANGULAR VELOCITY SENSOR ELEMENT AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor element capable of reducing erroneous detection and improving the durability/reliability of itself.

SOLUTION: The angular velocity sensor element comprises a vibration section 2; a fixing section 3 for supporting the vibration section 2; a drive electrode 6 that is formed on one surface of the vibration section 2 and excites the vibration section 2; and a detection electrode 7 that is formed on a surface in the same direction as the drive electrode 6 at the vibration section 2 and detects vibration generated in a direction vertical to the excitation direction by allowing the vibration section 2 to perform rotation. A protective film 8 for covering the drive electrode 6 and the detection electrode 7 is provided only on a surface where the drive electrode 6 and the detection electrode 7 are formed at the vibration section 2.

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