| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-nano transferring device which has a function of different transfer manufacturing processes and simplifies a structure. SOLUTION: The transferring device has at least a die 11, a substrate 13, and an energy transfer module 15. The substrate 13 is set in face to face with the die 11, and has at least a molding material layer 131. The energy transfer module 15 has an energy transfer element 151 and at least one energy source 153. Transfer molding is performed for the molding material layer 131 by transferring at least a part of transfer energy to the substrate 13 or the die 11 through an energy transfer element 153, by continuously installing the energy transfer element 151 to either the substrate 13 or the die 11 and supplying transfer energy from the energy source 153 to the substrate 13 or the die 11. COPYRIGHT: (C)2007,JPO&INPIT
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