| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor for stably precisely measuring displacement regardless of variation of a vibration cycle of an exciting means. SOLUTION: The displacement sensor comprises sampling an amount of receiving light with PD 19 by timing synchronized to a reference clock signal S4 multiplying a position signal S2 from a tuning fork amplitude detector 23 with a PLL circuit 30, capturing the maximum receiving light time point by approximating a curve on the basis of an amount of sampled receiving light, and then measuring the displacement of an object to be measured 17 on the basis of the position signal S2 from the tuning fork amplitude detector 23. COPYRIGHT: (C)2006,JPO&NCIPI
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