LOW DIELECTRIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To improve the properties of a low dielectric material formed by using a compound having a borazine ring structure. SOLUTION: The properties of the low dielectric material produced are improved by controlling the baking conditions for producing the low dielectric material. More specifically, the low dielectric material is obtained by baking the borazine ring-containing compound at 200-600°C in an atmosphere with an oxygen concentration of≤0.1 volume%. COPYRIGHT: (C)2005,JPO&NCIPI