发明名称 FABRICATION METHOD OF LIQUID CRYSTAL DISPLAY DEVICE
摘要 A method for fabricating a TFT array substrate for a liquid crystal display device is provided. The method includes: preparing a substrate; forming a gate line on the substrate using a first etchant; forming an insulation layer on the gate line; forming a semiconductor layer on a portion of the insulation layer; forming a test line on the insulation layer and source and drain electrodes on the semiconductor layer; forming a passivation layer having passivation hole to expose a portion of the gate line on the substrate; and forming a pixel electrode on the passivation layer by applying a second etchant including HNO<SUB>3</SUB>, a ferric compound, HClO<SUB>4 </SUB>and flouro compound.
申请公布号 KR20050042963(A) 申请公布日期 2005.05.11
申请号 KR20030077624 申请日期 2003.11.04
申请人 LG.PHILIPS LCD CO., LTD. 发明人 CHOI, SOON HO
分类号 G02F1/1368;G02F1/133;G02F1/136;G09F9/30;H01L21/00;H01L21/336;H01L21/461;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/49;H01L29/786;(IPC1-7):G02F1/136 主分类号 G02F1/1368
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