SUSCEPTOR FOR INDUCTION-HEATED EPITAXIAL REACTORS

摘要

The susceptor (1) for induction-heated epitaxial reactors comprises: a) a hollow body (2) in the shape of a truncated pyramid or a prism, provided with openings in its lower and upper faces, suitable for supporting substrates on its lateral faces, and made of an electrically-conductive material, b) a lower closing element (3), and C) an upper closing element (4); characterised in that the lower element (3) and/or the upper element (4) is made of electrically-insulating material.