发明名称 |
Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus |
摘要 |
<p>The invention relates to a transfer apparatus for transferring an object (W). the transfer apparatus comprises a gripper (15) for at least one of gripping the object (W) at a first position and then releasing the object (W) at a second position proximate to a receiver (20) and releasing the object (W) at a first position after gripping the object at a second position proximate to the receiver (20). The transfer apparatus is further provided with a measurement device (22) arranged to measure the relative position of the gripper (15) with respect to the receiver (20) in at least one dimension. Further, a relative position error is defined with respect to a desired relative position based on the relative position measured. The relative position of the gripper (15) and the receiver (20) are adjusted for minimizing the relative position error in the second position. <IMAGE></p> |
申请公布号 |
EP1465011(A1) |
申请公布日期 |
2004.10.06 |
申请号 |
EP20040076012 |
申请日期 |
2004.03.29 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VAN DIJK, MARCUS JOHANNES HENRICUS;HENNUS, PIETER RENAAT MARIA |
分类号 |
B25J13/08;G03F7/20;H01L21/683;H02N13/00;(IPC1-7):G03F7/20;B25J9/04;B25J9/06;B25J9/10 |
主分类号 |
B25J13/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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