发明名称 INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an inspection device which enables an increase in speed of the defect determination and in precision by automating the determination of contaminant or the like and providing a device with an address index. SOLUTION: An image data of a display element in a liquid crystal display is fetched by an image input device, and is compared with an image data of a normal display pixel stored in a memory, in an image processing device. Whether an abnormal part, where contaminant, defect, or the like occurs, is found is determined, and the size of contaminant or the like is determined. Thereby, for example, when determined that contaminant occurs, a control computer scans in X direction and Y direction. A bar code-like address index 18 is read in, and the address is stored in a recording device. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004214697(A) 申请公布日期 2004.07.29
申请号 JP20040095469 申请日期 2004.03.29
申请人 CANON INC 发明人 TAKAHASHI HIDEKAZU;KUWABARA EIJI
分类号 G01N21/956;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01N21/956
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